Sensirion Low Pressure Drop Flow Meter, -200 slm → 200 slm, SFM3000 Series

  • RS Stock No. 123-7150
  • Mfr. Part No. SFM3000-200
  • Manufacturer Sensirion
Technical data sheets
Legislation and Compliance
RoHS Certificate of Compliance
COO (Country of Origin): CH
Product Details

Sensirion SFM3000 Low Pressure Drop Digital Flow Meter

The Sensirion SFM3000 digital flow meter provides accurate measurements of air and other non-aggressive gases and is designed for high-volume applications. The very low pressure drop through the flow body of the sensor make it ideal for use in demanding situations such as laboratory use, medical ventilation and respiratory applications. The sensor is based on Sensirion’s patented CMOSens® sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. All measurement results are internally linearized and temperature compensated.
The SFM3000 flow meter is available with or without a protective cap/cover:
123-7150 1-100934-01 SFM3000-200 Without cap/cover
123-7149 1-100932-01 SFM3000-200C With cap/cover

Operation from 5Vdc supply
2-wire I2C digital interface
Low pressure drop
Flow range: ±200 slm (bidirectional)
Typical accuracy ±1.5% of measured value
Fast 0.5ms update time
Zero offset, no drift
22mm ISO5356-1:2004 conical fittings

Mass Flow Sensors and Meters

Attribute Value
Media Monitored Gas
Device Type Low Pressure Drop
Minimum Flow Rate -200 slm
Maximum Flow Rate 200 slm
Supply Voltage 5 V
Pipe Diameter Range 22 mm
Connection Type 2-Wire I2C
Maximum Pressure 1.3bar
Material Epoxy, Gold, Polyurethane, PPE+PS Blend, Si, Si3n4, Siox, Stainless Steel (Annealed)
Minimum Media Temperature -20 °C
Maximum Media Temperature +80°C
Minimum Operating Temperature -20°C
Maximum Operating Temperature +80°C
Series SFM3000
Discontinued product